Processing Magazine

Mass Flow Controllers

November 26, 2013

Brooks Instrument mass flow controllerBrooks Instrument has expanded its GF100 Series family of thermal mass flow meters and mass flow controllers (MFM/MFC) with three new products that offer higher flow, improved accuracy and a faster response time for gas flow control in semiconductor and LED manufacturing processes. The new Brooks GF101, GF121 and GF126 MFCs provide flow rates up to 300 slpm (standard liters per minute) N2 equivalent and are designed for process applications that include high-flow purge, epitaxial and blanket gas control. With its new product extension, Brooks now offers a full range of mass flow measurement and control products intended to help standardize fab-wide and foundry-wide semiconductor and LED processes. This line extension addresses key concerns of many process engineers, such as the need for common, consistent and repeatable performance characteristics across a tool. Ultimately, this helps contribute to achieving reproducible results from MFC to MFC, as well as standardizing maintenance and servicing. Building on the industry-leading specifications for purity standards, accuracy, response time and reliability established by the GF100 Series, all three new Brooks MFCs feature a compact, space-saving footprint and low power draw that enables the design of smaller, more efficient tools. The GF101, GF121 and GF126 also feature multiple digital and analog I/O interface options to support the broadest range of communication protocols, making them an ideal upgrade choice for older generation mass flow products. For ease of use, the new MFCs also feature a rotatable display that allows the readout screens to be rotated 180 degrees, for easier viewing and installation configurations.