Processing Magazine

Air Products to build Korean plant

October 9, 2006

Industrial gas supplier Air Products & Chemicals Inc. will build a nitrogen trifluoride plant in Korea to supply the growing Asian semiconductor and liquid crystal display markets, the Associated Press reports. Financial terms were not disclosed. Air Products said it will build the plant on its existing specialty gas site in Ulsan. The first phase should be completed by late 2007 with production of over 500 metric tons annually. Air Products said the plant will have the capacity to produce more than 2,500 metric tons annually at completion. Nitrogen trifluoride is used as a chamber cleaning gas in the manufacture of semiconductors, flat panel displays and other electronic devices.