Global Processing

CO2 metering pumps for water-free systems

September 15, 2003
Sealless diaphragm metering pumps handle supercritical CO2 at high pressures in water-free systems for cleaning etch residues during semiconductor chip fabrication and related pharmaceutical applications. Pumps for CO2 process metering in super clean water-free systems feature leak-free, sealless diaphragm technology with smooth internals, no dead spaces and low pump head volume. E Series.