Processing Magazine

Low-Pressure Drop Mass Flow Controller

September 7, 2011
Brooks Instrument, a provider of advanced flow, pressure, vacuum and level solutions, now offers a new Safe Delivery System (SDS®) option for its GF120 mass flow controllers. The GF120 SDS is a low-pressure drop mass flow controller that delivers sub-atmospheric SDS gases used in implant and etch processes. Sub-atmosphereic SDS gases are adsorbed onto a solid medium within the gas cylinder, remaining below atmospheric pressure despite containing up to 15 times more dopant than conventional pressurized sources.