Processing Magazine

Pinch valves for CMP slurry applications extend life cycle

January 10, 2006
Pinch Valves (PV) for CMP slurry applications feature a revolutionary flow through design and long lasting tube material. The Dymatrix PV Series provides a reliable extended life cycle, eliminating stress and particle cohesion. The PV Series Pinch Valves offer a cycle life of over 2 million cycles without degradation of functionality such as pressure resistance and slurry coagulations – problems typically associated with diaphragm valves in slurry applications. Additionally, the PV Series’ unique compound tube is resistant to vacuum operation, and will not collapse when exposed to limited vacuum service. The PV Series Pinch Valve is available in sizes ¼” through 1,” in manual and pneumatic styles, with a variety of tube and thread connections. External housing is offered in PVDF.