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Brooks Instrument

Mass Flow Controllers

Brooks Instrument has expanded its GF100 Series family of thermal mass flow meters and mass flow controllers (MFM/MFC) with three new products that offer higher flow, improved accuracy and a faster response time for gas flow control in semiconductor and LED manufacturing processes.
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Digital Capacitance Manometers

Brooks Instrument, a world-leading provider of advanced flow, pressure, vacuum and level solutions, provides the CMC and XacTorr™ Series digital capacitance manometers. These devices incorporate industry-leading features to improve measurement
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