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Brooks Instrument

Brooks Instrument

ARTICLES

Mass Flow Controllers

November 26, 2013
Brooks Instrument has expanded its GF100 Series family of thermal mass flow meters and mass flow controllers (MFM/MFC) with three new products that offer higher flow, improved accuracy and a faster response time for gas flow control in semiconductor and LED manufacturing processes.
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Armored Variable Area Flowmeter

May 6, 2013
The MT3809 armored variable area (VA) flowmeter from Brooks Instrument provides unprecedented flexibility regardless of application, process configuration or flowrate.
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Low-Pressure Drop Mass Flow Controller

September 7, 2011
Brooks Instrument, a provider of advanced flow, pressure, vacuum and level solutions, now offers a new Safe Delivery System (SDS®) option for its GF120 mass flow controllers. The GF120 SDS
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Digital Capacitance Manometers

August 23, 2011
Brooks Instrument, a world-leading provider of advanced flow, pressure, vacuum and level solutions, provides the CMC and XacTorr™ Series digital capacitance manometers. These devices incorporate industry-leading features to improve measurement
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