Optimizing the Production of Semiconductors with Almatec® FUTUR Series Pumps

The production of semiconductors is only possible if the pumps used to produce them can meet the challenges associated with the supply, circulation and filtration of high-purity chemicals, as well as the transfer of abrasive slurries and solvents. Realizing the importance for a reliable pump that offers full containment in critical semiconductor operations, Almatec^® began manufacturing its first generation of FUTUR Series Air-Operated Double-Diaphragm (AODD) Pumps in 1991. Based on decades of experience and innovation in the semiconductor industry, the current generation of FUTUR Series pumps incorporates a number of characteristic advantages that enable them to overcome the many challenges inherent in the production of semiconductors while providing a pure and safe operation.

Featuring a compact, simple design with few parts, FUTUR Series AODD pumps are self-priming and can easily be controlled via the air volume. The liquid flows straight through the product chambers of the center housing while the air control system and the air chambers are located in the side housing. This design ensures that only one part of the housing comes in contact with the liquid and reduces the number of flow bends to only two. There are also no fastening elements, such as tie rods or clamps, which minimizes the surface area, eliminates sliding parts in the product chambers and makes it possible to dispense with gaskets. All of these design features help to minimize the generation of particles.

FUTUR Series pumps are available in four models – T, H, E and S/SH – for a wide variety of applications. This breadth of models allows users to select the FUTUR Series pump that best fits their application, from cleaning processes in wafer preparation via etching in wet benches and polishing in CMP-processes to supplying chemicals in loop-lines and transferring liquids within the fab. This adaptive product approach is also supported by a choice of options for safety, monitoring and easy connection.

FUTUR T: Designed for delivering acids and caustics, features a wetted center housing of PTFE-TFM and non-wetted side housings of polyethylene. Available in 10, 20, 50 and 100 L/min (2.6-26 gpm) sizes.
FUTUR H: For hot applications with acids and caustics, this model has a center housing of PTFE-TFM and side housings of PTFE conductive. Available in 10 and 20 L/min (2.6 to 5.3 gpm) sizes.
FUTUR E: Used for pumping abrasive semiconductor slurries in Chemical-Mechanical-Planarization (CMP), this model has center and side housings of polyethylene. Available in 20 and 50 L/min (5.3 to 13 gpm) sizes.
FUTUR S/SH: Used to pump solvents and strippers, this model has center and side housings constructed of 316L stainless steel. Available in 20 and 50 L/min (5.3 to 13 gpm) sizes.

All FUTUR Series pumps have housing parts machined from solid blocks for long-life performance, and are cleaned, assembled and tested in a cleanroom line. They come equipped with the PERSWING P^® Air Control System to optimize air consumption and production rates. The FUTUR Series is currently available in its 4^th generation. All generations are drop-in interchangeable in connections.

To learn more, please visit the Almatec website.